JSM 2004 Online Program

Abstract #301943

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Activity Number:	304
Type:	Contributed
Date/Time:	Wednesday, August 11, 2004 : 8:30 AM to 10:20 AM
Sponsor:	Section on Quality and Productivity
Abstract - #301943
Title:	Defects Modeling and Yield Forecasting in Semiconductor Manufacturing
Author(s):	Michael Baron*+ and Asya Takken and Emmanuel Yashchin and Mary Wisniewski
Companies:	University of Texas, Dallas and IBM Microelectronics and IBM Research and IBM Research Division
Address:	Dept. of Mathematical Sciences, Richardson, TX, 75083-0688,
Keywords:	EM algorithm ; maximum likelihood ; missing data
Abstract:	Presented model reflects the cause-and-effect connection between observed defects on manufactured chips and their failures. Many factors such as defect type, size, frequency, and location play the role of covariates for yield prediction. Estimation of a large number of parameters is complicated by a substantial portion of uninspected layers and unclassified defects. Special model calibration techniques are proposed. Results of this analysis are used for designing optimal yield-enhancement strategies.

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