This is the program for the 2010 Joint Statistical Meetings in Vancouver, British Columbia.
Abstract Details
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Activity Number:
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181
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Type:
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Contributed
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Date/Time:
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Monday, August 2, 2010 : 10:30 AM to 12:20 PM
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Sponsor:
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Section on Quality and Productivity
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| Abstract - #307345 |
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Title:
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Stability Analysis of Double Multivariate EWMA Controller Under Dynamic Models
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Author(s):
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Chien-Hua Lin*+ and Sheng-Tsaing Tseng
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Companies:
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Providence University and National Tsing-Hua University
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Address:
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200 Chung Chi Rd., Taichung 43301, Taiwan, Taichung, International, , Taiwan, R. O. C.
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Keywords:
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Run-to-Run Control ;
Dynamic Models ;
Double Multivariate EWMA Controller ;
Stability Conditions
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Abstract:
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Many semiconductor manufacturing processes have, by nature, multiple-input and multiple-output(MIMO) variables. For a drifted MIMO model, the double multivariate exponentially weighted moving average (MEWMA) controller is a popular run-to-run (R2R) controller for adjusting the process mean to a desired target. In practical applications, the effect of the controllable factors on the response can be carried over several periods. Focusing on a second-order dynamic model, we propose a systematic approach to address this control problem. The stability conditions of double MEWMA controller are investigated. To design a stable double MEWMA controller, we derive an adequate formula for the sample size so that the stability conditions will be held with a minimum probability protection. Finally, we address the effects of the dynamic parameters on the determination of sample size.
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Authors who are presenting talks have a * after their name.
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