JSM 2005 Online Program

Abstract #304782

This is the preliminary program for the 2005 Joint Statistical Meetings in Minneapolis, Minnesota. Currently included in this program is the "technical" program, schedule of invited, topic contributed, regular contributed and poster sessions; Continuing Education courses (August 7-10, 2005); and Committee and Business Meetings. This on-line program will be updated frequently to reflect the most current revisions.

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Activity Number:	458
Type:	Contributed
Date/Time:	Wednesday, August 10, 2005 : 2:00 PM to 3:50 PM
Sponsor:	Section on Physical and Engineering Sciences
Abstract - #304782
Title:	Statistical Analysis of Equipment Profiles
Author(s):	Theresa Utlaut*+
Companies:	Intel Corporation
Address:	RA3 353, Hillsboro, OR, 97124-6497, United States
Keywords:	profiles ; generalized additive models ; splines
Abstract:	As microprocessor speeds pass four gigahertz, semiconductor manufacturers must wring all the available performance by any means possible. These means include collecting data at a rate that not long ago seemed unthinkable. For a manufacturing process with hundreds of steps, multiple pieces of equipment at most steps, and a potential for measuring hundreds of variables from each piece of equipment at a rate of many points per second, the quantity of data is overwhelming. Fortunately, with the advances in computer technology that make it possible to obtain these huge quantities of data, also come advances in statistical techniques to analyze them. A profile is a signature of an equipment response over time, which can be complex and is subject to instability. One of the key questions often posed from this type of data is whether the equipment profiles are similar to a reference profile. This presentation will review some of the newer statistical techniques as applied to equipment profile data from the semicondutor industry.

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