JSM 2004 - Toronto

Abstract #301952

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Activity Number: 49
Type: Contributed
Date/Time: Sunday, August 8, 2004 : 4:00 PM to 5:50 PM
Sponsor: Section on Quality and Productivity
Abstract - #301952
Title: On a Statistic to Assess the Randomness of Stability
Author(s): Kevin Anderson*+ and Russ Sype
Companies: Intel Corporation and Intel Corporation
Address: 1600 Rio Rancho Blvd., Rio Rancho, NM, 87124-1092,
Keywords: nonparametric ; SPC ; stability ; random
Abstract:

Process Control is a critical enabler of modern Semiconductor Manufacturing. It is not uncommon for a single semiconductor fabrication facility to maintain over 75,000 control charts on product, process, equipment, incoming material, and environmental characteristics. Manufacturers have committed resources to Advanced Process Control (APC) on their equipment to automate this control labor. APC implementation is justified only when a process's data are serially correlated. Some important questions semiconductor engineers and statisticians ask: Is this process stable? Would this process profit from APC? Is the APC system functioning properly? The answers to these questions hinge upon the degree of randomness in the attendant data. Procedures for testing randomness have been developed, and are appealing due to their familiarity and ease of computation. Unfortunately, these tests are also sensitive to non-normality. This presentation will describe the development of a rank-based procedure for testing for i.i.d. data, and will detail its use in the assessment of stability and randomness, providing case studies of its application in semiconductor manufacturing.

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Revised March 2004