JSM 2004 - Toronto

Abstract #301327

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Activity Number: 314
Type: Contributed
Date/Time: Wednesday, August 11, 2004 : 9:00 AM to 10:50 AM
Sponsor: Section on Physical and Engineering Sciences
Abstract - #301327
Title: The Properties of the Standard Deviation Illustrated with Engineering Data
Author(s): D. W. McCormack, Jr.*+
Companies: International Sematech Manufacturing Initiative
Address: 2706 Montopolis Dr., Austin, TX, 78741-6499,
Keywords: chi distribution ; measurement error ; noncentral chi-squared distribution
Abstract:

The standard deviation is commonly used to develop metrics for engineering data. It is appealing because it expresses the measurand in its original units rather than in squared units. Unfortunately, literature on the statistical properties of the standard deviation is less prevalent than that for the variance. This presentation illustrates the development and application of frequently used properties of the standard deviation, such as its mean and variance, from the context of measuring deviations from an idealized feature on an integrated circuit.


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Revised March 2004