Abstract #301233

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JSM 2003 Abstract #301233
Activity Number: 426
Type: Contributed
Date/Time: Wednesday, August 6, 2003 : 2:00 PM to 3:50 PM
Sponsor: Section on Physical and Engineering Sciences
Abstract - #301233
Title: Random Effects Models for Robust Design Based on Both Mean and Variance
Author(s): So Young Sohn*+
Companies: Yonsei University
Address: Dept. of Industrial Systems Engineering, Seoul, , , Korea
Keywords: correlated data ; robust design ; variance model ; quality engineering ; random effects model
Abstract:

We consider a robust parameter design of multiple stream processes where some variation is exhibited in both mean and variance performances. Random effects analyses are adopted to model both mean and variance as functions of some controllable factors and random errors.The models are estimated using a two-stage pseudo maximum likelihood procedure and are then utilized to find the robust design of IC fabrication processes.


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