Abstract #301089

This is the preliminary program for the 2003 Joint Statistical Meetings in San Francisco, California. Currently included in this program is the "technical" program, schedule of invited, topic contributed, regular contributed and poster sessions; Continuing Education courses (August 2-5, 2003); and Committee and Business Meetings. This on-line program will be updated frequently to reflect the most current revisions.

To View the Program:
You may choose to view all activities of the program or just parts of it at any one time. All activities are arranged by date and time.

The views expressed here are those of the individual authors
and not necessarily those of the ASA or its board, officers, or staff.

Back to main JSM 2003 Program page
JSM 2003 Abstract #301089
Activity Number: 367
Type: Contributed
Date/Time: Wednesday, August 6, 2003 : 10:30 AM to 12:20 PM
Sponsor: Section on Physical and Engineering Sciences
Abstract - #301089
Title: A Kurtosis-based Statistical Measure for Two-dimensional Processes and Its Applications to Image Sharpness
Author(s): Nien Fan Zhang*+ and Andras Vladar and Mike Postek and Bob Larrabee
Companies: National Institute of Standards and Technology and National Institutes of Standards and Technology and National Institutes of Standards and Technology and National Institute of Standards and Technology
Address: Statistical Engineering Division, Gaithersburg, MD, 20899-0001,
Keywords: autocorrelation function ; scanning electron microscope ; Fourier transform ; metrology ; periodogram
Abstract:

Fully automated or semiautomated scanning electron microscopes (SEM) are now commonly used in semiconductor production. The testing and proving that the instrument is performing at nano-scale level for production on a day-by-day basis, however, is not readily employed. We propose a statistical measure for the image sharpness based on bivariate kurtosis. This methodology has been successfully applied to the SEMs.

  • The address information is for the authors that have a + after their name.
  • Authors who are presenting talks have a * after their name.

Back to the full JSM 2003 program

JSM 2003 For information, contact meetings@amstat.org or phone (703) 684-1221. If you have questions about the Continuing Education program, please contact the Education Department.
Revised March 2003