Abstract #300201

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JSM 2003 Abstract #300201
Activity Number: 238
Type: Contributed
Date/Time: Tuesday, August 5, 2003 : 10:30 AM to 12:20 PM
Sponsor: Section on Quality & Productivity
Abstract - #300201
Title: Using EWMA Control Charts to Monitor Linear Relationships in Semiconductor Manufacturing
Author(s): Vivek Ajmani*+
Companies: Intel Corporation
Address: 1971 West Mead Court, Chandler, AZ, 85248,
Keywords: EWMA ; linear profiles ; regression analysis
Abstract:

Frequency speed (FMAX) of an individual die on a wafer is a critical parameter of interest in semiconductor manufacturing. It is well known that this parameter is dependent on the channel length (ACLEN) of transistors on the die. This dependency is characterized by a negative linear relationship. A problem of interest at Intel manufacturing is to monitor the performance of Lithography Steppers. This problem can be translated to monitoring the linear relationship between FMAX and ACLEN since the steppers are used to create the channels on transistors. In this seminar, we present EWMA control charts to monitor the linear profile between FMAX and ACLEN. This linear profile is monitored by using three control charts: one for the intercept, one for the slope, and one for the error around the regression line. A SAS(r)-based web tool will be used to demonstrate the above application on real manufacturing data from Intel.

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