Abstract #300821

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JSM 2002 Abstract #300821
Activity Number: 180
Type: Contributed
Date/Time: Tuesday, August 13, 2002 : 8:30 AM to 10:20 AM
Sponsor: Section on Physical & Engineering Sciences*
Abstract - #300821
Title: Potential Information and Experimental Design
Author(s): William Heavlin*+
Affiliation(s): Advanced Micro Devices
Address: One AMD Place, Sunnyvale, California, 94088-3453, USA
Keywords: eigenanalysis ; information theory ; optimal design ; response surface methods
Abstract:

Conventional measures of factory productivity discount experiments as inefficient and/or even unproductive. Motivated by the research and development environment of semiconductor manufacturing, this work proposes a complementary factory metric: potential information. The proposal adapts and modifies somewhat the D-optimal criterion of experimental design theory. Desirable properties include additivity, monotonicity, concavity, and boundedness. Key challenges revolve around disparate models, homogeneous (unsplit) batches, and very suboptimal experimental plans. Also sketched is the implementation into an existing factory information system.

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